Integrated microsystems refer to miniaturized (portable, handheld, implantable) electronic systems containing sensors, actuators, and sophisticated circuits that provide intelligent control and communication. It is an interdisciplinary field that is based in microelectronics but spans the technology and applications of many areas of science, engineering and medicine. Engineers in this field engage in research and development of analog and digital integrated circuits, RF circuits and wireless systems, microfabricated sensors and actuators, microelectronics packaging, and microfluidics. In this age of portable electronics, the theoretical and practical elements of the integrated microsystem field are increasingly important in a variety of applications including medical devices, environmental monitoring, energy scavenging, embedded systems and sensor networks. Students interested in this field will gain significant experience with the techniques and tools of integrated microsystems through courses covering mixed-signal integrated circuits, microelectronic materials and devices, microfabrication, and sensor instrumentation.

Graduate coursework at the M.S. and Ph.D. levels is centered in the Electrical and Computer Engineering (ECE) Department but may incorporate a variety of courses in science and engineering to provide the necessary background for specific integrated microsystems. Core courses in ECE focus on solid-state devices, micro-electro-mechanical systems (MEMS), analog and RF integrated circuits, VLSI design tools and methodologies, system-on-chip design and packaging, nanotechnologies, and biomedical microsystems.

Faculty and student researchers at MSU explore a wide range of technologies and applications associated with integrated microsystems. Current projects include modeling of smart materials, ultra-low-power electronics, energy harvesting circuits, biosensor array systems, bioelectrochemical sensors, wireless sensors, biomimetic devices and systems, lab-on-chip systems, and implantable microsystems. Research in the integrated microsystems area is often done in collaboration with scientists, engineers, and medical professionals to form investigative teams with the diverse expertise needed to address multi-disciplinary challenges.

Courses & Labs

  • ECE 404: RF Electronics (4 credits, Lecture & Lab)
  • ECE 410: VLSI Design (4 credits, Lecture & Lab)
  • ECE 412: Mixed Signal Circuit Design (4 credits, Lecture & Lab)
  • ECE 813: Advanced VLSI Design (3 credits, Lecture)
  • ECE 870: Introduction to Micro-Electro-Mechanical Systems (3 credits, Lecture)
  • ECE 871: Microsystems Fabrication (3 credits, Lecture)

Micro and Nano Electronics & VLSI Researchers:

Dean Aslam, Prem Chahal, Lixin Dong, Wen Li, Andrew Mason, John Papapolymerou, Fathi Salem, Xiaobo Tan, Cagri Ulusoy, Sangmin Yoo

Related Websites:

Smart Microsystems Laboratory (Tan)

Terahertz Systems - TELSA (Chahal)

NanoRobotic Systems Laboratory (Dong)

Microtechnology Laboratory (Li)

Advanced MicroSystems and Circuits Research Group (Mason)

Circuits, Systems and Artificial Neural Networks (Salem)

High-performance RF Integrated Systems on Chip (Ulusoy)

Integrated Circuits and Systems Group (Yoo)